Nano-scale ordering in amorphous silicon powders formed by plasma induced reaction of silane

Hofmeister, H.Dutta, J.Hofmann, H.2005-01-122005-01-122005-01-12199710.4028/www.scientific.net/MSF.235-238.595https://infoscience.epfl.ch/handle/20.500.14299/188566WOS:A1997BH18D00091Nano-scale ordering in amorphous silicon powders formed by plasma induced reaction of silanetext::journal::journal article::research article