Wyrsch, N.Droz, C.Feitknecht, L.Goerlitzer, M.Kroll, U.Meier, J.Torres, P.Vallat-Sauvain, E.Shah, A.Vanecek, M.2009-02-102009-02-102009-02-10200010.1557/PROC-609-A15.1https://infoscience.epfl.ch/handle/20.500.14299/35010Hydrogenated Microcrystalline Silicon: From Material to Solar Cellstext::conference output::conference proceedings::conference paper