Muralt, PaulMatloub Aghdam, Ramin2014-04-012014-04-01201410.5075/epfl-thesis-6086https://infoscience.epfl.ch/handle/20.500.14299/102313urn:nbn:ch:bel-epfl-thesis6086-2enAluminum NitrideAluminum Scandium NitridePiezoelectric constantsTFBARSMRQuality factorCoupling coefficientGrowth and properties of AlScN thin films for microwave transducers and piezoelectric energy harvestingthesis::doctoral thesis