Characterization of the mechanical properties of dry photoresist at foil-level lamination

Vasquez Quintero, AndresBriand, Danickde Rooij, Nico2012-08-292012-08-292012-08-292011https://infoscience.epfl.ch/handle/20.500.14299/85154Characterization of the mechanical properties of dry photoresist at foil-level laminationtext::conference output::conference presentation