Holzer, SimonTiwari, BhawnathKonstantinidi, Stefania Maria AlikiCivet, Yoan René CyrillePerriard, Yves2024-09-052024-09-052024-08-29https://infoscience.epfl.ch/handle/20.500.14299/240986Precise and robust positioning features are vital need in modern-day industries, particularly in the context of industrial automation within the micro/meso domain. In this work, we present a novel miniaturized planar microactuator with a total size of 40 mm in diameter, allowing maximum planar stroke of 220 μm in 100 ms. The actuator exhibits fine positioning with an accuracy of 4.5 μm. This paper discusses the system design, fabrication and experimental validation of the device performance.text::conference output::conference proceedings::conference paper