Filter, RobertScharf, ToralfHerzig, Hans Peter2010-09-102010-09-102010-09-10201010.2971/jeos.2010.10035shttps://infoscience.epfl.ch/handle/20.500.14299/53548WOS:000282766600006We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.linear displacementspecklesnon-contact measurementslaser measurementsoptical sensing and sensorsHigh resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrologytext::journal::journal article::research article