A TEM study of the structure in PtSi ultrathin layers obtained on Si(100) by Pt sputtering and annealing

Ruterana, PSolt, KBuffat, PA2007-02-152007-02-152007-02-15199110.1016/0039-6028(91)90971-Thttps://infoscience.epfl.ch/handle/20.500.14299/2738WOS:A1991FY12600030A TEM study of the structure in PtSi ultrathin layers obtained on Si(100) by Pt sputtering and annealingtext::journal::journal article::research article