Milyutin, E.Muralt, P.2011-08-112011-08-112011-08-11201110.1109/TUFFC.2011.1860https://infoscience.epfl.ch/handle/20.500.14299/69981WOS:000289834500002The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.BiosensorsSensortext::journal::journal article::research article