Abelé, N.Séguéni, K.Boucart, K.Casset, F.Buchaillot, L.Ancey, P.Ionescu, A. M.2007-05-162007-05-162007-05-16200610.1109/MEMSYS.2006.1627941https://infoscience.epfl.ch/handle/20.500.14299/6961WOS:000236994500221Ultra-low voltage MEMS resonator based on RSG-MOSFETtext::conference output::conference proceedings::conference paper