Rochat, G.Delachaux, A.Favez, D.Leterrier, Y.MÃ¥nson, J.-A. E.Fayet, P.2012-06-292012-06-292012-06-292001https://infoscience.epfl.ch/handle/20.500.14299/82828Influence of defects and internal stresses on the mechanical resistance and adhesion of thin PECVD oxide films on semi-crystalline polymerstext::conference output::conference proceedings::conference paper