Gardner, J. W.Lee, S. M.Bartlett, P. N.Guerin, S.Briand, D.de Rooij, N. F.2009-05-122009-05-122009-05-12200110.1007/978-3-642-59497-7_194https://infoscience.epfl.ch/handle/20.500.14299/39267Silicon planar microcalorimeter employing nanostructured filmstext::conference output::conference proceedings::conference paper