Buser, R. A.Brugger, J.de Rooij, N. F.2005-11-022005-11-022005-11-02199210.1016/0304-3991(92)90469-Zhttps://infoscience.epfl.ch/handle/20.500.14299/218589A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.text::journal::journal article::research article