Waldis, S.Zamkostian, F.Lanzoni, P.Noell, W.de Rooij, N. F.2009-05-122009-05-122009-05-12200810.1109/MEMSYS.2008.4443767https://infoscience.epfl.ch/handle/20.500.14299/40010Packaged MEMS Micromirrors for Cyrogenic Environmenttext::conference output::conference proceedings::conference paper