Ab initio study of the diffusion and decomposition pathways of SiHx species on Si(100)

Ceriotti, MicheleCereda, SilviaMontalenti, FrancescoMiglio, LeoBernasconi, Marco2013-07-252013-07-252013-07-25200910.1103/PhysRevB.79.165437https://infoscience.epfl.ch/handle/20.500.14299/93526Ab initio study of the diffusion and decomposition pathways of SiHx species on Si(100)text::journal::journal article::research article