Völkel, R.Herzig, H. P.Nussbaum, Ph.Blattner, P.Dändliker, R.Cullmann, E.Hugle, W.B.2009-04-222009-04-222009-04-22199710.1016/S0167-9317(96)00199-2https://infoscience.epfl.ch/handle/20.500.14299/37722Microlens Lithography and Smart Maskstext::journal::journal article::research article