Hettler, SimonRadtke, LucasGrünewald, LukasLisunova, YuliyaPeric, OliverBrugger, JuergenBonanni, Simon2019-10-102019-10-102019-10-0310.1016/j.micron.2019.102753https://infoscience.epfl.ch/handle/20.500.14299/161933Phase masks for electron microscopy fabricated by thermal scanning probe lithographytext::journal::journal article::research article