Nievergelt, Adrian PAndany, Santiago HAdams, Jonathan DHannebelle, Melanie TmFantner, Georg E2017-11-162017-11-16201710.1109/AIM.2017.8014104https://infoscience.epfl.ch/handle/20.500.14299/142198Components for high-speed atomic force microscopy optimized for low phase-lagtext::conference output::conference proceedings::conference paper