Fernández-Bolaños, M.Abelé, N.Bouvet, D.Pott, V.Racine, G.Quero, J. M.Ionescu, A. M.2007-05-162007-05-162007-05-162005https://infoscience.epfl.ch/handle/20.500.14299/6933Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensortext::conference output::conference proceedings::conference paper