Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309578https://infoscience.epfl.ch/handle/20.500.14299/206123Raw experimental data sorted by toolenInGaN PECVDPV applicationsdataset43f6387b-bf39-430d-8ecb-e6c2b9e879e3