Steen, J. A. J.Hayakawa, J.Harada, T.Lee, K.Calame, F.Boero, G.Kulik, A. J.Brugger, J.2006-03-232006-03-232006-03-23200610.1088/0957-4484/17/5/050https://infoscience.epfl.ch/handle/20.500.14299/228915WOS:000236496400058We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened moulds to yield sharp tips with radius below 20 nm. The material properties of tungsten were measured, yielding a hardness of 14 GPa, a specific resistivity of 14.8 μohm cm and Young’s modulus of 380 GPa. Analyses of the probes show a mechanical quality factor of 90 in air, and a low contact resistance of 25 ohm on a gold sample is measured. AFM imaging is demonstrated. As a step in the development of a robust electrically conducting AFM probe, the results are very promising.text::journal::journal article::research article