Molina-Lopez, FranciscoBriand, Danickde Rooij, Nico F.2015-05-292015-05-292015-05-29201410.1109/MEMSYS.2014.6765688https://infoscience.epfl.ch/handle/20.500.14299/114792WOS:000352217500131This works describes the fabrication process of an array of printed MEMS microbridges on polymeric foil, performed in only four easy steps. Each functional material was deposited exclusively by inkjet-printing technique, compatible with large-area fabrication. The array occupies an area of 2 mm x 2 mm and consists of 80 individual microbridges of 120 mu m x 80 mu m size each. When connecting all the bridges in parallel, the array displays a total capacitance value of 1.5 pF. The potential of the fabricated array has been demonstrated by employing it as a swelling-based capacitive humidity sensor where the polymeric substrate acts directly as the sensing layer.text::conference output::conference proceedings::conference paper