Völkel, R.Ossmann, Ch.Scharf, T.Herzig, H. P.Dändliker, R.2009-04-222009-04-222009-04-22199810.1117/12.324016https://infoscience.epfl.ch/handle/20.500.14299/37749Optical microsystems for imagingtext::conference output::conference proceedings::conference paper