Siddharth, AnatWeng, WenleLihachev, GrigoryRiemensberger, JohannTian, HaoLiu, JunqiuBhave, Sunil A.Kippenberg, Tobias J.2022-09-122022-09-122022-09-122021-01-0110.1364/CLEO_SI.2021.STu4D.7https://infoscience.epfl.ch/handle/20.500.14299/190667WOS:000831479801256We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser. (c) 2021TheAuthor(s)Engineering, Electrical & ElectronicOpticsPhysics, AppliedEngineeringPhysicstext::conference output::conference proceedings::conference paper