Destouches, N.Herzig, H. P.Nakagawa, W.Ottevaere, H.Pietarinen, J.Reynaud, S.Tervo, J.Tonchev, S.Turunen, J.Kujawinska, M.2009-04-222009-04-222009-04-22200610.1117/12.668466https://infoscience.epfl.ch/handle/20.500.14299/37989AFM benchmark for the profile characterization of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics NEMOtext::conference output::conference proceedings::conference paper