Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309577https://infoscience.epfl.ch/handle/20.500.14299/206122Raw experimental data sorted by toolenInGaN PECVDPV applicationsdatasetcc2ca786-aad6-4a39-a36c-e64f2788765d