Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication

Kim, Myun-SikOsowiecki, Gaël DavidScharf, ToralfKeeler, EthanRydberg, SkylerNakagawa, WataruHerzig, Hans Peter2012-10-262012-10-262012-10-262012https://infoscience.epfl.ch/handle/20.500.14299/86322Electron beam lithography (EBL)thermal reflowInvestigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabricationtext::conference output::conference proceedings::conference paper