Giunto, AndreaHumblot, NicolasBurnier, LucKrammer, AnnaSchuler, AndreasFontcuberta i Morral, Anna2021-02-192021-02-192021-02-192020-08-0610.1109/SUM48678.2020.9161032https://infoscience.epfl.ch/handle/20.500.14299/175394We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.GeSnco-sputteringthin filminfrared detectiontext::conference output::conference proceedings::conference paper