Introduction to the Feature Section on Optical MEMS and Nanophotonics

Lin, Lih Y.Herzig, Hans Peter2010-08-052010-08-052010-08-05201010.1109/JQE.2010.2052950https://infoscience.epfl.ch/handle/20.500.14299/52023WOS:000282563800001optical MEMSNanophotonicsIntroduction to the Feature Section on Optical MEMS and Nanophotonicstext::journal::journal article::research article