Proceedings of 28th International conference on Micro- and Nanoengineering (MNE'02, Sept. 16-19, 2003, Lugano, Switzerland)

2006-06-122006-06-122006-06-122003https://infoscience.epfl.ch/handle/20.500.14299/230434Proceedings of 28th International conference on Micro- and Nanoengineering (MNE'02, Sept. 16-19, 2003, Lugano, Switzerland)text::conference output::conference proceedings