Saadat Somaehsofla, ZahraMasserey, CyrilleVarini, AnnaFlandre, DenisIonescu, Mihai Adrian2025-04-102025-04-102025-04-09202510.1109/MEMS61431.2025.109175702-s2.0-105001661505https://infoscience.epfl.ch/handle/20.500.14299/249016Vanadium dioxide (VO2) exhibits structural phase transition that can be triggered by thermal, electrical, and mechanical stimuli, making it a highly interesting material for MEMS/NEMS based sensors and actuators thanks to responsivity and exceptional sensitivity. For the first time, we report highly sensitive 2-terminal polycrystalline thin-film (100nm) VO2 strain sensor with 534-gauge factor, based on wafer-scale optimized Pulse Laser Deposition (PLD). Improvement in polycrystalline VO2 microstructure was fundamental to achieve this sensitive strain sensor. The proposed CMOS-compatible fabrication method of such strain sensors is scalable and expected to advance the development of new integrated strain sensors exploiting phase change materials.enfalsePhase Change MaterialPulse Laser DepositionStrain SensitivityStrain SensorVanadium Dioxidetext::conference output::conference proceedings::conference paper