Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Mertin, SHeinz, BRattunde, OChristmann, GDubois, MANicolay, SMuralt, P2018-11-082018-11-082018-11-08201810.1016/j.surfcoat.2018.01.046https://infoscience.epfl.ch/handle/20.500.14299/150781WOS:000437066400002Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium contenttext::journal::journal article::research article