Muralt, PaulPashchenko, VladimirParsapour, FazelMertin, StefanHeinz, BerndNicolay, Pascal2020-03-052020-03-052020-03-052019-01-0110.1109/ULTSYM.2019.8926081https://infoscience.epfl.ch/handle/20.500.14299/166992WOS:000510220100066The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit governing the performance of MEMS devices. The aim of this contribution is to give a short overview on actual topics in processing, properties, and applications in RF filters and sensors.piezoelectricthin filmaln-scnradio frequencytext::conference output::conference proceedings::conference paper