Traut, S.Herzig, Hans Peter2013-01-162013-01-162013-01-16200010.1117/1.602359https://infoscience.epfl.ch/handle/20.500.14299/87890We report on the investigation of refractive microlens arrays with diffractive grating surfaces in the context of a microspectrometer array system. The elements fabricated combine the fairly large dimensions of the refractive microlens (990-μm diam, 60-μm height) with the submicron features of the diffraction grating (1-μm grating period) on one transmitting surface. The fabrication process of these elements was studied, as well as their performance with respect to resolution and stray-light suppression. The maximum resolution was 3 nm, and the stray-light suppression 25 dB. We present a concept for a system of miniaturized spectrometer arrays for chemical analysis.text::journal::journal article::research article