Psaltis, D.Wang, X.2010-11-252010-11-252010-11-25199910.1117/12.349322https://infoscience.epfl.ch/handle/20.500.14299/58843WOS:000081442500017A high efficiency, low cost, low voltage operation liquid crystal on silicon (LCOS) beam steering device with multiple angles addressing capability is developed. Currently, seven steering angles with as high as 92.7% efficiency are achieved within 2.85v. The device's design consideration, fabrication process as well as the characterization results are described.beam deflectorliquid crystal on silicon(LCOS)beam steeringdiffractive opticstext::conference output::conference proceedings::conference paper