Nussbaum, Ph.Völkel, R.Roulet, J.-Ch.Verpoorte, S.Weible, K. J.Bruno, A. E.Herzig, H. P.2009-04-222009-04-222009-04-221997https://infoscience.epfl.ch/handle/20.500.14299/37708Design, fabrication and testing of microlens arrays for sensors and microsystemstext::conference output::conference proceedings::conference paper