Courbat, J.Barbieri, M.Briand, D.de Rooij, N. F.2011-08-092011-08-092011-08-09201110.1109/TRANSDUCERS.2011.5969465https://infoscience.epfl.ch/handle/20.500.14299/69932We report on the reliability of micro-heating elements made on a polyimide plastic foil. Tests on the maximum power the devices could withstand before failure and their aging when operating continuously at a constant temperature between 200 and 400°C were performed. They demonstrated that the hotplates can operate at continuous elevated temperatures at very low-power for more than a year. The deformation of the hotplate during operation and the failure mechanisms were studied. Such investigation is of interest for the design of robust metal-oxide gas sensors on foil to be directly integrated into smart sensing labels.Reliability of micro-hotplates on polyimide foiltext::conference output::conference proceedings::conference paper