Martin, F.Jan, M. E.Belgacem, B.Dubois, M. A.Muralt, P.2007-10-182007-10-182007-10-18200610.1016/j.tsf.2006.03.005https://infoscience.epfl.ch/handle/20.500.14299/13091WOS:0002392184000518958Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonatortext::journal::journal article::research article