Mazza, M.Badila, D.Perruisseau-Carrier, J.Ionescu, A. M.Skrivervik, A.2006-11-302006-11-302006-11-302006https://infoscience.epfl.ch/handle/20.500.14299/236706Nano-gap MEMS resonators and adapted oscillator designtext::conference output::conference paper not in proceedings