Villanueva, G.Rius, G.Bausells, J.Montserrat, J.Perez-Murano, F.2013-08-062013-08-062013-08-062003https://infoscience.epfl.ch/handle/20.500.14299/93870E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detectiontext::conference output::conference proceedings::conference poster