Mouaziz, S.Imboden, C.Santschi, C.Vazquez Mena, O.Popovic, R.Brugger, J.Boero, G.2007-09-132007-09-13200710.1109/SENSOR.2007.4300701https://infoscience.epfl.ch/handle/20.500.14299/12096WOS:000249603700644We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.text::conference output::conference proceedings::conference paper