Jaecklin, V. P.Linder, C.de Rooij, N. F.Moret, J.-M.Vuilleumier, R.2009-05-122009-05-122009-05-12199410.1016/0924-4247(94)80131-2https://infoscience.epfl.ch/handle/20.500.14299/39444Line-Addressable Torsional Micromirrors for Light Modulator Arraystext::journal::journal article::research article