Optimized staircase profiles for diffractive optical devices made from absorbing materials

Nöhammer, B.David, C.Gobrecht, J.Herzig, H. P.2009-04-222009-04-222009-04-22200310.1364/OL.28.001087https://infoscience.epfl.ch/handle/20.500.14299/37900Optimized staircase profiles for diffractive optical devices made from absorbing materialstext::journal::journal article::research article