Leterrier, Y.Rochat, G.MÃ¥nson, J.-A.2012-06-292012-06-292012-06-292002https://infoscience.epfl.ch/handle/20.500.14299/82700oxide thin filmpolymer substratedefectsinternal stresscohesionadhesionFunctional Layered Compositestext::conference output::conference proceedings::conference paper