High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

Ehbets, P.Herzig, H. P.Kuittinen, M.Clube, F. S. M.Darbellay, Y.2009-04-222009-04-222009-04-22199510.1117/12.205661https://infoscience.epfl.ch/handle/20.500.14299/37659High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithographytext::journal::journal article::research article