A Grid Reactor with Low Ion Bombardment Energy for Large Area PECVD of Thin Film Silicon Solar Cells

Hollenstein, ChristophHowling, AlanChesaux, Michaël2013-03-182013-03-182013-03-18201310.5075/epfl-thesis-5686https://infoscience.epfl.ch/handle/20.500.14299/90452urn:nbn:ch:bel-epfl-thesis5686-3enplasma enhanced chemical vapor depositioncapacitively coupledgrid reactorlow ion bombardment energyplasmoidretarding field energy analyserphase resolved optical emission spectroscopycapacitive probefluid simulationthin filmphotovoltaic solar cellA Grid Reactor with Low Ion Bombardment Energy for Large Area PECVD of Thin Film Silicon Solar Cellsthesis::doctoral thesis