Akiyama, TerunobuGautsch, SebastianParrat, DanielImer, RaphaelVettiger, PeterStaufer, Ursde Rooij, Nicolaas F.2010-05-192010-05-192010-05-19201010.1002/tee.20527https://infoscience.epfl.ch/handle/20.500.14299/50137WOS:000277128900001In this study, we introduce five unique scanning vibes developed in our laboratory for different fields of application These probes are the results of excellent collaborations with many external partners Each probe possesses many advanced features that one can hardly obtain with plane probes for conventional optical deflection system The applications of these probes are very versatile. from atomic force microscope for the exploration of Mars to In vivo measurements of human knee cartilage (C) 2010 Institute of Electrical Engineers of Japan Published by John Wiley & Sons. IncAfmcantileverconductive probepiezoresistive probe self-sensing probearray probeAtomic-Force MicroscopyQuartz Tuning ForkCantileverAdvanced Scanning Probes for Micro-Nano Science Researchestext::journal::journal article::research article