Noell, W.Sun, W.de Rooij, N. F.Herzig, H. P.Manzardo, O.Dändliker, R.2009-04-222009-04-222009-04-22200210.1109/LEOS.2002.1159440https://infoscience.epfl.ch/handle/20.500.14299/37852Optical MEMS based on silicon-on-insulator (SOI) for monolithic microopticstext::conference output::conference proceedings::conference paper