Mouaziz, S.Dysli, A.Brugger, J.Boero, G.2007-09-132007-09-13200710.1109/SENSOR.2007.4300438https://infoscience.epfl.ch/handle/20.500.14299/12111WOS:000249603700381In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the achieved production yield was about 70%. Cantilevers have been characterized in vacuum, at room temperature, and revealed promising properties for MRFM applications. A cantilever of 500x10x0.34text::conference output::conference proceedings::conference paper