Manzardo, O.Guldimann, B.Marxer, C.de Rooij, N. F.Herzig, H. P.2009-04-222009-04-222009-04-22200010.1109/OMEMS.2000.879609https://infoscience.epfl.ch/handle/20.500.14299/37802Optics and actuators for miniaturized spectrometerstext::conference output::conference proceedings::conference paper