Design, fabrication and testing of micro-optical components for sensors and microsystems

Völkel, R.Nussbaum, Ph.Roulet, H.-Ch.Blattner, P.Weible, K. J.Herzig, H. P.2009-04-222009-04-222009-04-22199710.1117/12.281227https://infoscience.epfl.ch/handle/20.500.14299/37714Design, fabrication and testing of micro-optical components for sensors and microsystemstext::conference output::conference proceedings::conference paper